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HISTORY OF TECHNOLOGY, TECHNOLOGY, OBJECTS AROUND US
Micromechanics. History of invention and production
Directory / The history of technology, technology, objects around us Precise mechanics was born back in the XNUMXth century - with the advent of wall and table clocks. It did not require a qualitative technological leap, since it used traditional methods, but only on a smaller scale. And today, no matter how small the details here, they can still be manufactured according to common standards, working with the same tools and on the same machines - albeit the most precise ones - using the usual methods of assembling products. "The key here is, perhaps, a mechanical processing tool," Boris Ponkratov writes in the Tekhnika-Youth magazine. - cameras, audio and video equipment, disk drives and printers for personal computers, copiers - not to mention various special equipment, for example, for joining fiber-optic communication lines. Laser micromachining alone occupies a whole range, although, it must be said right away, it has no independent significance: there are few fundamentally new operations here. Basically, we are talking about soldering microcircuits and creating holes of various shapes (for example, in spinnerets for obtaining ultra-thin fibers from synthetic resins). But the real revolutionary technological re-equipment requires the next step - micromechanics.
The dimensions of micromechanical devices are such that small and ultra-small devices are not enough to create them. As a criterion, we take the minimum size of objects that this technology is capable of manipulating. To simplify the picture, we round the values up to an order of magnitude. And putting them on a scale scale, we get a kind of spectrum, where each technology occupies a certain "range" (approximate minimum dimensions are given in millimeters): classical precision mechanics - 1, laser micromachining - 0,01, micromechanics and microelectronics - 0,0001, nanotechnology - 0,000001". The milestone is truly fatal for any mechanisms - distances less than 100 nm. Then the laws of classical mechanics noticeably "weaken", and more and more interatomic forces, thermal vibrations, and quantum effects make themselves felt. The localization of elements of devices is drastically difficult, the concept of the trajectories of their movement loses its meaning. In short, under such conditions one cannot speak of "mechanisms" consisting of "details" at all. Micromechanics was lucky: from the very beginning, it managed to settle "on the shoulders of a giant" - microelectronics, having received from it a practically ready-made technology for mass production. After all, the proven and constantly developing technology of the most complex electronic microcircuits lies in the same range of scales. And just as many hundreds of ready-made integrated circuits are obtained on a single silicon wafer, it turned out to be possible to make several hundred mechanical parts at once. That is, to establish normal mass production. Silicon, used in microelectronics, has become the main material for micromechanisms. Moreover, a wonderful opportunity has opened up here to create both structures in a complex, in a single technological process. Such hybrids proved so cheap to produce that some examples quickly found their way into the most mass-produced commercial products, such as the silicon accelerometer now fitted to one of the well-known car safety systems, the inflatable bag.
The inertial sensor of this instrument was designed by Richard Muller of the University of California. In general terms, the design is extremely simple: a silicon rod with a diameter of several microns is suspended above a hole made in the silicon substrate. When acceleration occurs, the rod with an electric potential applied to it begins to vibrate and induces a signal that is processed by a microprocessor located tens of microns in the neighborhood. A sufficiently sharp drop in speed (at the moment of impact in an accident) is instantly recorded by the accelerometer, and it issues a command to fill the air bag in the center of the steering wheel, which protects the driver from the most typical injury - hitting the steering wheel or windshield. The Japanese corporation Toshiba has created an electromagnetic motor with a diameter of 0,8 millimeters and a weight of 4 milligrams. Its power, of course, is small, but sufficient for miniature robots, the development of which is now being stubbornly pursued by the country's leading companies under the general supervision of the Ministry of Economy and Industry. In addition to Toshiba, the corporations Mitsubishi Electric and Hitachi play the main violin in this program. The length of the robots they develop ranges from a centimeter to several millimeters. A person will swallow a capsule with such a device, and after the dissolution of its shell, the device, obeying the radio signals and the program embedded in it, will begin to move independently through the blood vessels, gastrointestinal tract and other pathways. Miniature robots are designed for diagnostics, performing micro-operations, for delivering drugs exactly as intended and at the right time. They are also expected to be used to repair and replace batteries in artificial organs. The German firm Mikrotek has already created a prototype of a new type of medical instrument - a miniature "submarine" for swimming through blood vessels. Under the direction of a doctor, she is able to perform some operations. This self-contained probe is 4 mm long and 0,65 mm in diameter. It does not have an engine, the screw is driven by an external variable magnetic field, which allows it to reach speeds of up to one meter per hour. In the future, the microprobe will be equipped with a cutter for removing cholesterol plaques from the walls of blood vessels. He will be able to carry the medicine capsules to the right place. Another option is also proposed - to place ultrasound generators on such micro-devices. Translucent of the patient's organs from the inside, doctors will receive information that remains inaccessible in conventional diagnostics. A few more modest but useful microdevices have also found application - for example, a rotation speed meter built directly into the bearing or internal sensors for blood pressure, heart rate, blood sugar and other body parameters that transmit information to the outside by radio signal. Author: Musskiy S.A.
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